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透明导电氧化物(TCOs)是现代光电子领域的关键材料.然而,常规以晶态In2O3:Sn为代表的TCOs薄膜在近红外波段透明度和机械柔性方面存在局限,这严重限制了其在全光谱器件和柔性光电子设备的应用.因此,开发具有全光谱透明度及良好柔性的TCOs薄膜显得尤为重要.本文利用室温磁控共溅射法生长了Cd1-xInxO1+δ合金薄膜,研究了其晶体结构和光电特性随合金组分的变化.我们成功获得了高性能的非晶态透明导电Cd1-xInxO1+δ合金薄膜,探究了其相应的环境稳定性和机械柔性,并探讨了其柔性太阳能电池应用.研究结果为非晶态透明导电Cd-In-O合金薄膜的深入研究与其光电应用提供了重要的参考依据.
Abstract：Transparent conductive oxides(TCOs) play a crucial role in modern optoelectronics.However,conventional TCO thin films,exemplified by crystalline In2O3:Sn,suffer from limitations in transparency in the near-infrared range and mechanical flexibility,thereby hindering their widespread use in full-spectrum devices and flexible optoelectronic applications.Hence,the development of TCO thin films with enhanced full-spectrum transparency and superior flexibility is of paramount importance.In this study,Cd1-xInxO1+δ alloy thin films were fabricated using room temperature magnetron sputtering.The investigation focused on the variations in crystal structure and optoelectronic properties with changes in alloy composition.The research successfully yielded high-performance amorphous transparent conductive Cd1-xInxO1+δ alloy thin films.Additionally,the study delved into exploring the environmental stability and mechanical flexibility of these films,along with discussing their potential applications in flexible solar cells.The findings presented in this research offer valuable insights for further exploration of amorphous transparent conductive Cd-In-O alloy thin films and their diverse optoelectronic applications.
[1] E LLMER K. Past achievements and future challenges in the development of optically transparent electrodes[J]. Nature Photonics,2012,6(12):809-817.
[2] MORALES-MASIS M,De WOLF S,WOODS-ROBINSON R,et al. Transparent electrodes for efficient optoelectronics[J]. Advanced Electronic Materials,2017,3(5):1600529.
[3] GINLEY D S,HOSONO H,PAINE D C. Handbook of transparent conductors[M]. New York:Springer,2011.
[4] DIXON S C,SCANLON D O,CARMALTA C J,et al. n-Type doped transparent conducting binary oxides:an overview[J]. J Mater Chem C,2016,29(4):6946-6961.
[5] FORTUNATO E,BARQUINHA P,MARTINS R. Oxide semiconductor thin film transistors:areview of recent advances[J]. Adv Mater,2012,24(22):2945-2986.
[6] YU K M,MAYER M A,SPEAKS D T,et al. Transparent conductors for full spectrum photovoltaics[J].Journal of Applied Physics,2012,111(12):123505.
[7] NGUYEN T T, PATEL M, KIM J. Multifunctional AZO/Ag(O)-based transparent conductor fo r flexible and transparent optoelectronics[J]. Solar RRL,2024(9):8.
[8] CHANG S,KOO J H,YOO J,et al. Flexible and stretchable light-emitting diodesand photodetectors for human-centric optoelectronics[J]. Chem Rev,2004,124(3):768-859.
[9] MA D,JI M,YI H,et al. Pushing the thinness limit of silver films for flexible optoelectronic devices via ion-beam thinning-back process[J]. Nat Commun,2024,15:2248.
[10] WU Y Y,XU G Y,XI J C,et al. In situ crosslinking-assisted perovskite grain growth for mechanically robust flexible perovskite solar cells with 23.4%efficiency[J]. Joule,2023,7(2):398.
[11] KUMAR S,SEO Y. Flexible transparent conductive electrodes:unveiling growth mechanisms,material dimensions,fabrication methods,and design strategies[J]. Small Methods,2023,8(1):2300908.
[12] WON D,BANG J,CHOI S H,et al. Transparent electronics for wearable electronics application[J].Chemical Reviews,2023,123(16):9982-10078.
[13] NGUYEN V H,PAPANASTASIOU D T,RESENDE J,et al. Advances in flexible metallic transparent electrodes[J]. Small,2022,19(19):2106006.
[14] JI C G, LIU D, ZHANG C, et al. Ultrathin-metal-film-based transparent electrodes with relative transmittance surpassing 100%[J]. Nat Commun,2020,11(1):3367.
[15] SIM S H,KANG K T,LEE S,et al. Indium-free amorphous Ca-Al-O thin films as a transparent conducting oxides[J]. Chem Mater,2019,31(19):8019-8025.
[16] KOIDA T,NOMOTO J. Sustainable transparent conducting oxides:insights from amorphous SnOx thin films via oxygen stoichiometry control[J]. Chem Mater,2024,36(14):6838-6848.
[17] LIU C P,HO Y,KWOK C C K,et al. High mobility transparent amorphous CdO-In2O3alloy films synthesized at room temperature[J]. Appl Phys Lett,2017,111(7):072108.
[18] HOSONO H. Ionic amorphous oxide semiconductors:material design,carrier transport,and device application[J]. J Non-Cryst Solids,2006,352:851-858.
[19] LIU C P,HO C Y,DOS REIS R,et al. Room-temperature-synthesized high-mobility transparent amorphous CdO-Ga2O3alloys with widely tunable electronic bands[J]. ACS Appl Mater Interfaces,2018,10(8):7239-7247.
[20] JIA J, IWASAKI S, YAMAMOTO S, et al. Temporal evolution of microscopic structure and functionality during crystallization of amorphous indium-based oxide films[J]. ACS Appl Mater Interfaces,2021,13(27):31825-31834.
[21] TAYLOR M P,READEY D W,VAN HEST M F A M,et al. The remarkable thermal stability of amorphous In-Zn-O transparent conductors[J]. Adv Funct Mater,2008,18(20):3169-3178.
[22] BURBANO M, SCANLON D O, WATSON G W. Source of conductivity and doping limits in CdO from hybrid density functional theory[J]. J Am Chem Soc,2011,133(38):15065-15072.
[23] WU Y,WANG Y,WANG M X, et al. Tailoring epsilon-near-zero wavelength and nonlinear absorption properties of CdO thin films by Mo doping[J]. Appl Phys Lett,2024,125(1):011104.
[24] YANG Y, LU J, MANJAVACAS A, et al. High-harmonic generation from an epsilon-near-zero material[J]. Nat Phys,2019,15(10):1022.
[25] YUK M,DETERT D M,CHENG B,et al. Defects and properties of cadmium oxide based transparent conductors[J]. J Appl Phys,2016,119(18):181501.
[26] LIU C P,FOO Y,KAMRUZZAMAN M,et al. Effects of free carriers on the optical properties of doped CdO for full-spectrum photovoltaics[J]. Phys Rev Appl,2016, 6(6):064018.
[27] LIU C P,WU S,ZHANG Y,et al. Resonant transition metal Ti or Ta doping in high mobility transparent conducting CdO:the effects of doping concentration[J]. Phys Rev Materials,2024,8(4):044603.
[28] WU S, ZHA S J, ZHANG Y, et al. Defect-dependent environmental stability of high mobility transparent conducting In-doped CdO[J]. J Appl Phys,2024,135(4):045302.
[29] YU K M,ZHU W,WANG Y,et al. Transition metal elements as donor dopants in CdO[J]. Phys Rev Materials,2023,7(7):074602.
[30] WANG Y,LI M,FAN B,et al. Flexibility of room-temperature-synthesized amorphous CdO-In2O3alloy films and their application as transparent conductors in solar cells[J]. ACS Appl Mater Interfaces,2021,13(36):43795-43805.
[31] J A WOOLLAM CO INC. CompleteEASETMdata analysis manual[M]. USA,2011.
[32] PARKS I,AHN J H,FENG X,et al. Theoretical and experimental studies of bending of inorganic electronic materials on plastic substrates[J]. Adv Funct Mater,2008,18(18):2673-2684.
[33] SMIRNOV Y,REPECAUD P A,TUTSCH L,et al. Wafer-scale pulsed laser deposition of ITO for solar cells:reduced damage vs. interfacial resistance[J]. Materials Advances,2022,3(8):3469-3478.
基本信息:
DOI：
中图分类号:TB383.2
引用信息:
[1]巫珊,叶芷桦,张洋等.高性能非晶态透明导电Cd-In-O合金薄膜的光电特性及其柔性光伏应用[J].汕头大学学报(自然科学版),2025,40(01):3-12+2.
基金信息:
广东省基础与应用基础研究委员会基金（2023A1515010556,2024A1515012961）; 国家自然科学基金委基金（12374073）; 李嘉诚基金会基金（2024LKSFG01）